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Evaluation of elastic properties and temperature effects in Si thin films using an electrostatic microresonatorJEONG, Jeung-Hyun; CHUNG, Sung-Hoon; LEE, Se-Ho et al.Journal of microelectromechanical systems. 2003, Vol 12, Num 4, pp 524-530, issn 1057-7157, 7 p.Article

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Corner-cube retroreflectors based on structure-assisted assembly for free-space optical communicationLIXIA ZHOU; KAHN, Joseph M; PISTER, Kristofer S. J et al.Journal of microelectromechanical systems. 2003, Vol 12, Num 3, pp 233-242, issn 1057-7157, 10 p.Article

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Die-level characterization of silicon-nitride membrane/silicon structures using resonant ultrasonic spectroscopyHANG GUO; LAL, Amit.Journal of microelectromechanical systems. 2003, Vol 12, Num 1, pp 53-63, issn 1057-7157, 11 p.Article

Surface topography evolution and fatigue fracture in polysilicon MEMS structuresALLAMEH, Seyed M; SHROTRIYA, Pranav; BUTTERWICK, Alex et al.Journal of microelectromechanical systems. 2003, Vol 12, Num 3, pp 313-324, issn 1057-7157, 12 p.Article

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Design of electrostatically actuated MEMS switchesLAI, Yeong-Lin; CHANG, L.-H.Colloids and surfaces. A, Physicochemical and engineering aspects. 2008, Vol 313-314, pp 469-473, issn 0927-7757, 5 p.Conference Paper

Ferroelectric materials and their applications in microsystems and nanotechnologyWHATMORE, R. W.euspen : european society for precision engineering and nanotechnology. International conference. 2001, pp 120-123, 2VolConference Paper

Finite-element analysis on cantilever beams coated with magnetostrictive materialDEAN, J; GIBBS, M. R. J; SCHREFL, T et al.IEEE transactions on magnetics. 2006, Vol 42, Num 2, pp 283-288, issn 0018-9464, 6 p., 2Article

Stochastic Modeling of the Pull-In Voltage in a MEMS Beam StructureATTILA BOLONI, Francisc; BENABOU, Abdelkader; TOUNZI, Abdelmounaim et al.IEEE transactions on magnetics. 2011, Vol 47, Num 5, pp 974-977, issn 0018-9464, 4 p.Conference Paper

High-resolution wavefront control : methods, devices, and applications III (San Diego, 1-3 August 2001)Gonglewski, John D; Vorontsov, Mikhail A; Gruneisen, Mark T et al.SPIE proceedings series. 2002, isbn 0-8194-4207-0, VIII, 296 p, isbn 0-8194-4207-0Conference Proceedings

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Precision engineering nanotechnology (Turin, 27-31 May 2001 )Balsamo, A; Evans, C.J; Frank, A et al.euspen : european society for precision engineering and nanotechnology. International conference. 2001, 2Vol, XXVII, 855 pConference Proceedings

Technology for integrated spatial light modulators based on reflective membranesSAKARYA, S; VDOVIN, G; SARRO, P. M et al.SPIE proceedings series. 2002, pp 21-28, isbn 0-8194-4207-0Conference Paper

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Thick Electroplated Co-Rich Co-Pt Micromagnet Arrays for Magnetic MEMSNAIGANG WANG; ARNOLD, David P.IEEE transactions on magnetics. 2008, Vol 44, Num 11, pp 3969-3972, issn 0018-9464, 4 p., 2Conference Paper

Fabrication of ultralow-profile micromachined inductor with magnetic core materialGAO, Xiao-Yu; YONG ZHOU; WEN DING et al.IEEE transactions on magnetics. 2005, Vol 41, Num 12, pp 4397-4400, issn 0018-9464, 4 p.Article

Adhesion and friction forces in microelectromechanical systems: mechanisms, measurement, surface modification techniques, and adhesion theoryKOMVOPOULOS, K.Journal of adhesion science and technology. 2003, Vol 17, Num 4, pp 477-517, issn 0169-4243, 41 p.Article

Characterization of MEMS transducer performance using near-field scanning interferometryBLACKSHIRE, James L; SATHISH, Shamachary.IEEE transactions on ultrasonics, ferroelectrics, and frequency control. 2002, Vol 49, Num 5, pp 669-674, issn 0885-3010Article

Signal Integrity and EMC/EMI Measurement Analysis of RF MEMS Devices via a Combined FETD/Higher Order FVTD TechniqueKANTARTZIS, Nikolaos V.IEEE transactions on magnetics. 2009, Vol 45, Num 3, pp 1404-1407, issn 0018-9464, 4 p.Conference Paper

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